JPH0378249U - - Google Patents
Info
- Publication number
- JPH0378249U JPH0378249U JP13973589U JP13973589U JPH0378249U JP H0378249 U JPH0378249 U JP H0378249U JP 13973589 U JP13973589 U JP 13973589U JP 13973589 U JP13973589 U JP 13973589U JP H0378249 U JPH0378249 U JP H0378249U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- detection device
- manufacturing equipment
- semiconductor manufacturing
- sampling pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000005070 sampling Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 4
- 239000011261 inert gas Substances 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 239000002341 toxic gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13973589U JPH0378249U (en]) | 1989-11-30 | 1989-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13973589U JPH0378249U (en]) | 1989-11-30 | 1989-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0378249U true JPH0378249U (en]) | 1991-08-07 |
Family
ID=31686761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13973589U Pending JPH0378249U (en]) | 1989-11-30 | 1989-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0378249U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006011131A (ja) * | 2004-06-28 | 2006-01-12 | Asahi Kasei Aimii Kk | 色付きコンタクトレンズ |
-
1989
- 1989-11-30 JP JP13973589U patent/JPH0378249U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006011131A (ja) * | 2004-06-28 | 2006-01-12 | Asahi Kasei Aimii Kk | 色付きコンタクトレンズ |